Sub-nanometer Z-axis nanopositioner P-620.Z to P-622.Z
0.1 nm resolution × 0.02% linearity. High-speed servo control of 50-250 µm with zero friction.
The PIHera P-620.Z/P-621.Z/P-622.Z is a Z-axis piezo stage that drives vertical strokes of 50, 100, and 250 µm with a resolution of 0.1 nm. The capacitive sensor directly measures the moving platform, suppressing linear errors to 0.02%. The zero-backlash flexure guide requires no lubrication and is dust-free, achieving a resonance frequency in the kHz range and sub-millisecond response. The actuator is an all-ceramic insulated PICMA(R) that has demonstrated a long lifespan of 10 billion cycles. It is ideal for Z-axis control in devices that require both sub-nanometer stability and high speed, such as interferometers, confocal microscopes, and semiconductor inspection. *For more details, please download the PDF or contact us.*
- Company：PI Japan
- Price：Other
![[For Semiconductors] PIHera High-Precision Z-Axis Stage with 0.1 nm Resolution](https://image.mono.ipros.com/public/product/image/311014/IPROS16254095115971746427.jpg?w=280&h=280)
